CMP Powerhouse Automated Single wafer & Batch Process Tool

Your space. Your process. Our solution.

GigaMat delivers custom automation that fits perfectly in your facility and works the way you need it to.

The Automated Polishing Machine “Freedom”

 

The Automated Polishing Machine “Freedom” top view labels

CMP Powerhouse Automated Single Wafer & Batch Process Tool

GigaMat Technologies' advanced turn key solution: The CMP Powerhouse Automated System

  • Modular design featuring demounting module, mounting module, carrier washer and press, and two CMP polishers

  • All modules operated by two main 6-axis robots

  • Multiple operating modes: fully autonomous, partially autonomous, manual mode, and various maintenance modes for specific machine sections

  • Power to choose number of polishers and process steps

  • Power to customize process sequence, resulting in increased productivity

  • Power to remove any polisher from the line for maintenance without affecting other process steps or automation

  • Power to achieve higher process flexibility

  • Throughput up to 240 wafers per hour

  • Design allows customers to run all polishers without automation if needed

  • RFID tracking for all carriers

  • Options:

    • a. Polishing both sides: Automatic flipping of wafers to polish the reverse side

    • b. Integrated post-polishing with third-party Megasonic and cleaning systems

 

The Automated Polishing Machine “Freedom” with 3 polishers