Sorters

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Model 200TRT Sorter (4”-8” wafers) - Belt Systems
Model 150TRT sorter (3”-6” wafers) - Belt Systems

• High precision and stability multiple-point measurement on one axis for thickness, type, and resistivity
• Easy Operation Pentium III touch screen PC with advanced recipe-control software
• Maximum 1000 wafers per hour throughput on one center-point measurement
• Measures thickness and resistivity, as low as .001Ohm
• All sensors are non-contact; radial gradient measurements are available
• Every cassette is independently programmable
• Reliable and easy to maintain belt system
• Cleanroom compatible

Options: TTV, Bow, Warp, STIR, SFPD measurements

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Model 300TRT Wafer Sorter

• Wafer diameter: 300mm (option 200mm)
• Throughput: Max. 450 wafer per hour on one center-point measurement
• None Contact Gauges: Thickness, Resistivity, Type, OCR
• Surface: As-Cut, Lapped, Polished
• Wafer Handling: Standard Robot and Belt arrangement
• Measurement: Center point, 2-point Resistivity and radial grading
• Cassette: 25 slot & 13 slot
• Configuration: (4) input station (12) output station precision and stability multiple-point measurement on one axis for thickness, type, and resistivity

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Model TRTS-300 Semi Automated sorter & inspection system for Semiconductor and & PV wafers

Wafer diameter measurement sets: 4" / 5" / 6" / 8"/12”
PV sorter: 100,125,150... 157mm pseudo square

Build Your Own Sorter
The customer may choose from the following gauges, sender and receiver configurations, and custom design their own sorter.

1. Non- Contact Type
2. Non-Contact Thickness
3. Non-Contact Resistivity

Sorter Applications

• Prime and test wafer manufacturing
• Wafer reclaim & Wafer brokers
• PV manufacturing
• Before lapping and polishing processes
• Anywhere in-process