Accessories

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200LU Stand Alone Wafer Presenter - Automated Wafer Loading and Unloading

• System handles wafers and increases yield by decreasing wafer breakage, scratches and contamination.
• Flexibility between 4"-8" wafer diameter measurements with just a switch.
• Compact, mobile, modularized and ready to plug-in.
• Reliable and self-contained unit, with built-in processor control making unit autonomous.
• Convenient "pick&place" from front recess

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Wafer Elevator – Model 4568

• The GigaMat Model 4568 Cassette Elevator sends and receives wafers, sizes 100mm, 125mm, 150mm and 200mm, out of or into cassettes
• Single 24-volt DC power supply
• The Elevator provides two means of external control: RS232C for single unit operation and RS422/485 for multi-unit operation
• Up to 31 units may be daisy-chained for RS422/485 systems
• The design of the elevator is modular in that all major components are removable and replaceable
• This device utilizes micro-stepping motors (3) to minimize audible noise and provide smooth, vibration-less operation. In addition, the operating parameters of these motors (start step rate, final step rate, acceleration and deceleration) are programmable.
• These parameters are stored in non-volatile memory.
• The Elevator slots are programmable, which allows none standard cassettes to be used

Parts

1. Bearing Puller, Head Spindle 0510-0072
2. Spanner Wrench (Jack Screw Model) 0510-0074
3. Lifting Fixture, Rib Plate 0510-0076
4. Pin, Alignment, Rib Plate 0510-0077
5. Pad Removal Tool 0510-0079
6. Spanner Wrench, Uniflat Head Shaft 0510-0092
7. Wrench, No. 6 Bearing Nut 0510-0093
8. Digital Pressure Gauge 0510-2000
9. “O” Ratchet Set (Cushion Adjust) 0510-2010
10. Non-Contact Temperature Gauge 0510-2020
11. Digital Tachometer 0510-2030
12. Template Installation Fixture 0510-2040
13. Pad Dress Brush Assembly 0510-2050
14. Gauge Bar Assembly, Uniflat 0161-0042
15. Replacement Pad Dress Brush 0161-5081
16. Platen Flatness Bar Gauge 0510-2060
17. Pyrometer Alignment Tool  0161-5012