Polishers

Model 3806 Polisher

150mm silicon wafer polisher with template process

• Up to 6" wafer polishing capabilities, including silicon, quartz, LiNi, Sapphire, Silicon carbide, Germanium ….
• Lowest Cost of Ownership with high production throughput and low maintenance requirements
• State-of-the-art touch screen recipe control utilizing Pentium technology
• Three-way valve slurry recovery
• Wax mount conversion kit
• Network capabilities
• Turn key solution available

Model 3808 Polisher

200mm silicon wafer polisher with template process

• Up to 8 " wafer polishing capabilities, including silicon, quartz, LiNi, Sapphire, Silicon carbide, Germanium….
• Lowest Cost of Ownership with high production throughput and low maintenance requirements
• State-of-the-art touch screen recipe control utilizing Pentium technology
• Three-way valve slurry recovery
• Wax mount conversion kit
• Network capabilities
• Turn key solution available

Model 3812 Polisher

300mm silicon wafer polisher (Patent Pending)

• Implementing head oscillation feature needed to polish one wafer per polishing carrier.
• Achieve processing of one to four 300mm wafer per polishing run.
• Oscillation movement originates with the drive box and travel distance is five (5) inches.
• Up to 12" wafer polishing capabilities, including silicon, quartz, LiNi, Sapphire, silicon Carbide...
• Implementing Head oscillation feature
• Template or Wax mount
• Turn key solution available